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The Institute of Process Engineering (IVT) was founded in 1990 within the Faculty of Mechanical Engineering. First, there was only one chair. 1994 and 1995, three new professors were appointed to be chairs of Mechanical, Thermal and Chemical Engineering. In these years, also the teaching and research activities have been extended considerably.

After the founding of the Faculty Process and Systems Engineering in 1998, the Institute of Process Engineering, the new faculty, was assigned as one of four institutes. A further expansion of research activities took place in 1999 with the occupation of the Chairs Biochemical Engineering and Process Systems Engineering.

 Chemical Process Engineering | Head: Prof. Dr. Andreas Seidel-Morgenstern

 Thermal Process Engineering | Head: Prof. Dr. Evangelos Tsotsas

 Mechanical Process Engineering | Head: Prof. Dr. Jürgen Tomas

 Bioprocess | Head: Prof. Dr. Udo Reichl

 Process Systems Engineering | Head: Prof. Dr. Kai Sundmacher